Pure metal and metal alloy sputtering target material list
Sputtering target materials are widely applied in electronics and information industry, such as integrated circuit, information storage, LCD screen, laser storage and electronic control devices, etc;Can also be applied to glass coating field;Can also be applied to wear, high temperature and corrosion resistant, high grade decoration products and other industries.
classification
According to the shape can be divided into long target, target, round target, the target
According to the composition can be divided into a metal target materials, alloy material, ceramic compound material
According to the application domain is divided into microelectronics target material, magnetic recording material, CD target materials, precious metal target material, film resistance target material, conductive membrane material, the surface modification of target, the mask layer target material, decorative material, electrode material, packaging material and other material
Product Name
|
Element Symbol
|
purity
|
shape
|
Titanium Sputtering Target
|
Ti
|
2N5,4N,5N
|
Planar target, Rotary target
|
Nickel Sputtering Target
|
Ni
|
2N5, 3N
|
Planar target, Rotary target
|
Zirconium Sputtering Target
|
Zr
|
2N5
|
Planar target, Rotary target
|
Aluminum Sputtering Target
|
Al
|
5N 6N
|
Planar target, Rotary target
|
Copper Sputtering Target
|
Cu
|
3N5,4N
|
Planar target, Rotary target
|
Tungsten Sputtering Target
|
W
|
3N5
|
Planar target, Rotary target
|
Molybdenum Sputtering Targets
|
Mo
|
3N5
|
Planar target, Rotary target
|
Tantalum Sputtering Target
|
Ta
|
3N5, 4N
|
Planar target, Rotary target
|
Niobium Sputtering Target
|
Nb
|
3N5, 4N
|
Planar target, Rotary target
|
Cobalt Sputtering Target
|
Co
|
3N5 3N8
|
Planar target, Rotary target
|
Chromium Sputtering Target
|
Cr
|
3N5
|
Planar target, Rotary target
|
Titanium Aluminum Sputtering Target
|
Ti + Al
|
2N5
|
Planar target, Rotary target
|
Molybdenum Niobium Sputtering Target
|
Mo+Nb
|
3N5
|
Planar target, Rotary target
|
Tungsten Molybdenum Sputtering Target
|
W+Mo
|
3N5
|
Planar target, Rotary target
|
NiobiumZirconium Sputtering Target
|
Nb+Zr
|
3N5
|
Planar target, Rotary target
|
|
|