金属名称

含量

熔点

蒸发源

形状

钛

2N6,4N,5N

1668℃

B

颗粒，片

镍

2N6,3N

1453℃

EB

颗粒，片

锆

2N5

1890℃

EB

颗粒，片

钨

3N5

3410±20℃

EB

颗粒，片

钼

3N5

2620℃

EB

颗粒，片

钽

3N5

2996℃

EB

颗粒，片

铌

3N5

2468℃

EB

颗粒，片

钴

3N8

1495℃

EB

颗粒，片